Książka Wafer Bonding Marin Alexe

Wafer Bonding

Applications and Technology

Język: Angielski
Oprawa: Miękka
Dostępność: Dostępna u dostawcy
Wysyłamy za 5-8 dni
1 483.81
The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCS...

Informacje o książce

Język
Angielski
Oprawa
Książka - Miękka
Data wydania
2011
strony
504
EAN
9783642059155
ISBN
3642059155
Enbook ID
01651230
Waga
795
Wymiary
155 x 235 x 29

Pełny opis

The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.During the past decade direct wafer bonding has developed into a mature materials integration technology. This book presents state-of-the-art reviews of the most important applications of wafer bonding written by experts from industry and academia. The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.

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