Toward Inertial-Navigation-on-Chip

Name: Toward Inertial-Navigation-on-Chip
Brand: Springer Nature Switzerland AG
SKU: 9783030254698
Price: 606.11 PLN
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The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes

Autor: Haoran Wen

Język:

Oprawa: Twarda

Wydawca: Springer Nature Switzerland AG

Dostępność: Dostępna u dostawcy

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606.11 zł

This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement uni...

Informacje o książce

Autor

Haoran Wen

Język

Angielski

Oprawa

Książka - Twarda

Data wydania

2019

strony

127

EAN

9783030254698

Enbook ID

24518988

Wydawca

Springer Nature Switzerland AG

Waga

454

Wymiary

155 x 235 x 14

Pełny opis

This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes. Firstly, theoretical and experimental studies of physical phenomena including mode localization, nonlinear behavior, and energy dissipation provide new insights into challenges like quadrature errors and flicker noise in resonator gyroscope systems. Secondly, advanced designs and micro/nano-fabrication methods developed in this work demonstrate valuable applications to a wide range of MEMS/NEMS devices. In particular, the HARPSS+ process platform established in this thesis features a novel slanted nano-gap transducer, which enabled the first wafer-level-packaged single-chip IMU prototype with co-fabricated high-frequency resonant triaxial gyroscopes and high-bandwidth triaxial micro-gravity accelerometers. This prototype demonstrates performance amongst the highest to date, with unmatched robustness and potential for flexible substrate integration and ultra-low-power operation. This thesis shows a path toward future low-power IMU-based applications including wearable inertial sensors, health informatics, and personal inertial navigation.

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Toward Inertial-Navigation-on-Chip

The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes

Informacje o książce

Pełny opis

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