Semiconductor Wafer Bonding - Science and Technology

Autor: Q.Y. Tong, Ulrich Gosele

Język:

Oprawa: Twarda

Wydawca: John Wiley & Sons Inc

Dostępność: Dostępna u dostawcy

Wysyłamy za 9-15 dni

788.95 zł

A one-stop resource on all aspects of semiconductor wafer bonding for materials scientists and elect...

Informacje o książce

Autor

Q.Y. Tong, Ulrich Gosele

Język

Angielski

Oprawa

Książka - Twarda

Data wydania

1998

strony

320

EAN

9780471574811

ISBN

0471574813

Enbook ID

04892270

Wydawca

John Wiley & Sons Inc

Waga

654

Wymiary

165 x 236 x 24

Pełny opis

A one-stop resource on all aspects of semiconductor wafer bonding for materials scientists and electrical engineers Semiconductor Wafer Bonding addresses the entire spectrum of mainstream and likely future applications of wafer bonding. It examines all of the important issues surrounding this technology, including basic interactions between flat surfaces, the influence of particles, surface steps and cavities, surface preparation and room-temperature wafer bonding, thermal treatment of bonded wafer pairs, and much more. This unique, one-stop resource consolidates information previously available only by time-consuming searches through technical journals, proceedings, and book chapters for more than 1,000 published articles on wafer bonding. It covers all materials used for wafer bonding-including silicon, III-V compounds, fused and crystalline quartz, glass, silicon carbide, sapphire, ferroelectrics, and many others. For materials scientists and electrical engineers who need to exploit the potential of this flourishing technology, Semiconductor Wafer Bonding is a convenient one-stop resource for answers to many common questions. It is also an excellent text/reference for graduate students eager to learn about this interdisciplinary field, which spans surface chemistry, solid-state physics, materials science, and electrical engineering.

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