Książka Process development for nanostructuring and 3D micro/nanointegration Senn Tobias

Process development for nanostructuring and 3D micro/nanointegration

Autor: Senn Tobias
Język: Angielski
Oprawa: Miękka
Dostępność: Dostępna u dostawcy
Wysyłamy za 8-11 dni
190.52
Micro- and Nanostructures significantly influence the physical and chemical properties of surfaces....

Informacje o książce

Autor
Język
Angielski
Oprawa
Książka - Miękka
Data wydania
2015
strony
180
EAN
9783838150284
ISBN
3838150287
Enbook ID
09187233
Waga
272
Wymiary
152 x 229 x 10

Pełny opis

Micro- and Nanostructures significantly influence the physical and chemical properties of surfaces. Therefore, such structures can be used to functionalize surfaces and adjust the surface properties to the specific requirements of a certain application. A remaining challenge is the integration of functional structures into micro devices to achieve e.g. patterning in 3D, 3D surface structures and sidewall patterning. This work is focused on the development of processes to achieve both, the accurate replication of micro and nanostructures as well as the integration of functional surface structures into micro devices.

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