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Książka Predictive Simulation of Semiconductor Processing Jarek Dabrowski

Predictive Simulation of Semiconductor Processing

Status and Challenges

Autor: Jarek Dabrowski, Eicke R. Weber
Język: Angielski
Oprawa: Miękka
Wydawca: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Dostępność: Dostępna u dostawcy
Wysyłamy za 5-8 dni
930.23 zł
Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the s...

Informacje o książce

Autor
Jarek Dabrowski, Eicke R. Weber
Język
Angielski
Oprawa
Książka - Miękka
Data wydania
2010
strony
490
EAN
9783642058042
ISBN
3642058043
Enbook ID
01651135
Wydawca
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Waga
859
Wymiary
155 x 235 x 28

Pełny opis

Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.Predictive simulation of semiconductor processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.

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