Książka Lithography Michael Wang

Lithography

Autor: Michael Wang
Język: Angielski
Oprawa: Twarda
Wydawca: In Tech
Dostępność: Dostępna u dostawcy
Wysyłamy za 10-13 dni
638.54
Lithography, the fundamental fabrication process of semiconductor devices, plays a critical role in...

Informacje o książce

Autor
Język
Angielski
Oprawa
Książka - Twarda
Data wydania
2010
strony
680
EAN
9789533070643
ISBN
9533070641
Enbook ID
24118972
Wydawca
Waga
1270
Wymiary
170 x 244 x 37

Pełny opis

Lithography, the fundamental fabrication process of semiconductor devices, plays a critical role in micro- and nano-fabrications and the revolution in high density integrated circuits.

This book is the result of inspirations and contributions from many researchers worldwide. Although the inclusion of the book chapters may not be a complete representation of all lithographic arts, it does represent a good collection of contributions in this field. We hope readers will enjoy reading the book as much as we have enjoyed bringing it together. We would like to thank all contributors and authors of this book.

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