Książka Doping Engineering for Front-End Processing: Volume 1070 B. J. PawlakM. L. PelazM. LawK. Surugo

Doping Engineering for Front-End Processing: Volume 1070

Język: Angielski
Oprawa: Twarda
Dostępność: Dostępna u dostawcy
Wysyłamy za 9-15 dni
425.62
Materials scientists, silicon technologists and TCAD researchers come together in this book to share...

Informacje o książce

Język
Angielski
Oprawa
Książka - Twarda
Data wydania
2008
strony
319
EAN
9781605110400
ISBN
160511040X
Enbook ID
02060462
Waga
568
Wymiary
157 x 235 x 23

Pełny opis

Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

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