Książka Crucial Issues in Semiconductor Materials and Processing Technologies S. Coffa

Crucial Issues in Semiconductor Materials and Processing Technologies

Proceedings of the NATO Advanced Study Institute on Semiconductor Materials and Processing Technologies Erice, Italy 1-13 July 1991

Język: Angielski
Oprawa: Twarda
Wydawca: Springer
Dostępność: Dostępna u dostawcy
Wysyłamy za 10-13 dni
851.70
Semiconductors lie at the heart of some of the most important industries and technologies of the twe...

Informacje o książce

Język
Angielski
Oprawa
Książka - Twarda
Data wydania
1992
strony
538
EAN
9780792320036
ISBN
0792320034
Enbook ID
01393899
Wydawca
Waga
2130
Wymiary
155 x 235 x 35

Pełny opis

Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in design rules poses real challenges for the materials scientists and processing engineers. Materials, defects and processing now have to be understood in their totality. World experts discuss, in this volume, the crucial issues facing lithography, ion implication and plasma processing, metallization and insulating layer quality, and crystal growth. Particular emphasis is placed upon silicon, but compound semiconductors and photonic materials are also highlighted. The fundamental concepts of phase stability, interfaces and defects play a key role in understanding these crucial issues. These concepts are reviewed in a crucial fashion.

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