SZEROKI WYBÓR
Oferujemy ponad milion pozycji anglojęzycznych – od literatury pięknej po specjalistyczną .
ISBN | 9781032122144 |
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Autor | Ryu Yu Kyoung |
Wydawca | Crc Pr Inc |
Język | english |
Oprawa | Pevná vazba |
Rok wydania | 2022 |
Liczba stron | 128 |
The most complete book available on scanning probe lithography (SPL), this work details the modalities, mechanisms, and current technologies, applications, and materials on which SPL can be performed. It provides a comprehensive overview of this simple and cost-effective technique, which does not require clean room conditions and can be performed in any lab or industry facility to achieve high-resolution and high-quality patterns on a wide range of materials: biological, semiconducting, polymers, and 2D materials.
- Introduces historical background of SPL, including evolution of the technique and tools
- Explains the mechanism of sample modification/manipulation, types of AFM tips, technical parts of the experimental setup, and materials on which the technique can be applied
- Shows the different types of devices and structures fabricated by SPL, together with the processing steps
- Contains a complete and state-of-the art package of examples and different approaches, performed by different international research groups
- Summarizes strengths, limitations, and potential of SPL
This book is aimed at advanced students, technicians, and researchers in materials science, microelectronics, and others working with lithographic techniques and fabrication processes.